Design and Analysis of Nano Vibratory Beam Gyroscope

Abstract

Gyroscope is an angular rate measurement sensor having broad application in the field of automotive, military services, aerospace and consumer electronics industries. Silicon micro machined MEMS vibratory gyroscopes have better advantages compared to conventional gyroscope. Nano beam vibratory gyroscope is one of the simple gyroscope. It has relatively small size, light weight, low power consumption, low cost and simple structure. When a gyroscope is made to rotate at its base along with some excitation in one of the bending direction, due to Coriolis effect, there will be significant displacement in other bending direction. Dynamic modeling of beam gyroscope is very interesting area. In the micro/nano level actuation and sensing are with electrostatics principles. This report presents the modeling and analytical simulation task of a nano cantilever beam gyroscope. Static and dynamic analysis of a nano/micro cantilever gyroscope with a tip mass is studied. Pull-in instability corresponding voltage is estimated from static and frequency response. Pull-in stability regions are identified as a function of beam length, tip mass value, elastic modulus of the beam. Nonlinearities due to geometry and the external forces including electrostatic and van der Waals forces are considered during modelling. Squeeze film and slide film damping are considered to account the damping force between the tip mass and sense and drive direction. The dynamic solution is obtained by using Galerkin’s reduction scheme. The time response and the frequency domain graphs are arrived for different parameters on both sense and drive directions. The interactive program developed in the work are helpful to account any experiments for additional force at nano level