Experimental Set Up for Vacuum Laboratory

Abstract

This project deals with study, procurement and installation of some vacuum apparatus for performing experiments in vacuum laboratory. This lab was proposed to be used for graduate and post graduate students. Four experimental set ups were designed as a part of this project. It includes pumping speed measurement of diffusion pump, pumping speed measurement of turbomolecular pump, measurement of conductance of different vacuum elements, and calibration of vacuum gauges. As part of project work, vacuum systems and components were studied, bills of materials were prepared, required components were purchased and installation of experimental set up was done. Pumping speed measurements of high vacuum pumps (diffusion pump and turbomolecular pump) was done by constant volume method. For getting more accuracy Vacuum chamber was tested for leak rate using a MSLD (Mass spectrometer leak detector). Conductance of vacuum elements was measured for different piping arrangements by measuring corresponding changes in effective pumping speed of pumps. Conductance was calculated in low vacuum range using rotary vane pump. Calibration of vacuum gauges was done in low vacuum range by using the method of direct comparison with standard gauge.